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Research Interests

Papers共 19 篇Author StatisticsCo-AuthorSimilar Experts

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Spatial Frequency Breakdown of CD Variation
Tatiana Kovalevich, Barbara Witek,Daniel Riggs,Joost Bekaert,Lieve Van Look,Mark John Maslow
37TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE (2022)
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Author Statistics

#Papers: 19

#Citation: 275

H-Index: 9

G-Index: 15

Sociability: 4

Diversity: 2

Activity: 0

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