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Papers共 32 篇Author StatisticsCo-AuthorSimilar Experts

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Improvement of Photomask CD Uniformity Using Spatially Resolved Optical Emission Spectroscopy
Junhwa-Jung,Youngkeun Kim,Il-Yong Jang,Byung-Gook Kim,Chan-Uk Jeon,Minwook Kang,Changmin Lee,Jae W. Hahn
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2016): 6
Cited1Views0Bibtex
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0
Front Matter: Volume 9422
-2z Abe, Reza S. Abhari, F. Abreau, Chang-Nam Ahn, Jinho Ahn, Shaul Aloni, Paul D. Ashby, Rajesh N. Davé, William A. Barletta, M. Beckers,Genevieve Beique,Markus P. Benk, Robert W. Berg, В. Г. Беспалов, James M. Blackwell, H.B.K. Boom, N. Böwering, John P. Boyle, Robert L. Brainard, Markus Brandstätter, David Brandt, D. S. Brown,Elizabeth Buitrago, Brian Cardineau, Shu-Hao Chang, Virander S. Chauhan, Alek Chen, Jack Chen, Lin Lee Cheong, Shang‐Chieh Chien, Hsiang-Yu Chou, C. H. Chuang, Joseph J.Y. Sung, Chia‐Chun Chung,Deniz Civay, Rene A. Claus, John T. Curry, de Jong, Daniele del Re,Wolfgang Demmerle, De Simone, Alexander Donoghue, Wayne J. Dunstan, William G. Earley, Hans-Christoph Eckstein, Daniel T. Elg,В. В. Елизаров,Andreas Erdmann, Alex I. Ershov,Roberto Fallica, Yu-Jen Fan, Nigel R. Farrar, Jo Finders, Andreas Fischer, Igor V. Fomenkov, M. Frei, Anita Fumar-Pici, Emily R. Gallagher, Nadia Gambino, Daniël Geelen, Anne-Marie Goethals,Kenneth A. Goldberg,A. S. Grishkanich, Guha Neogi, Eric M. Gullikson, Jyotirindra Das Gupta, Scott Halle, Steve Hansen, Shane Harlson, Harriet Noreen, Harris-Jones Harumoto, A. Hassanein, Shannon B. Hill, Ric Hoefnagels, Emiko Hori, Jodi Hotalen, Rafael C. Howell, Roger D. Huang, Tao-Ming Huang, Duane Hudgins, Hyun Huli,Il-Yong Jang,Jiaren Jiang, René Jilisen, David G. Johnson, 0m Juschkin, Norbert Kaiser,S. V. Kascheev, Yukiko Kikuchi, Guk-Jin Kim, In-Seon Kim, Jung Kim, Seo-Min Kim, Young‐Sik Kim,Ulrich Klostermann, Chiew-Seng Koay, Markus Koch, Ron Kool,Margarete Kops,Ralf Kops, Marie Krysak,Tero S. Kulmala, Aditya Kumar, Romain Lallement, R. Lebert, Jae Lee, Seung Hwan Lee, Sung‐Gyu Lee, Liang Li, Chang-Moon Lim, Yen-Chih Lin, Chi‐Chun Liu, Huayu Liu, J.M. Mangat, Yōko Matsumoto, Yuriko Matsuura, Ken Matthews, Malcolm Mcgeoch,Andrew Metz,Ryan Miyakawa,Cecilia Montgomery,Warren Montgomery,Jan Mulkens, Philipp Naujok,Patrick Naulleau, Jens Neumann,Andrew R. Neureuther, K. Nowak, Leonidas E. Ocola, Hye-Keun Oh,Gianluca Panici, Pengfei Jin,Rudy Peeters,Sascha Perlitz, Marco Perske, Jan Peters,Vicky Philipsen,Alberto Pirati,Thomas V. Pistor,Ivan Pollentier, Moshe E. Preil, D J Pritchard,Jed Rankin, Daniel W. Riggs, Gijsbert Rispens, Stefan Risse, Jim Rodriguez,Kurt Ronse, Matthias Rösch, D. N. Ruzic, Rick Sandstrom, Julius Joseph Santillan, A. A. Schafgans, Sven Schröder, Chun-Hsing Shih, T. Sizyuk, Bruce Smith, Daniel Smith, Lindsay Smith, Hyun Song, Shailendra N. Srivastava, Ralf Steinkopf, H. W. Stokes, Noriaki Takagi, Jenny Tempeler, A. Thean, Aniket Thete, J. Torres, R. M. Tromp, Naoko Tsugama, Andreas Tünnermann, Christina Turley, Sean Valente, Dieter Van den Heuvel, S Van Der Molen, Ingen Van, Coen Verspaget, Michaela Vockenhuber, Von Wezyk, Yow-Gwo Wang, Wei Watanabe, Markus Weiß, O. R. Wood, James Word, Jiansong Wu,Sander F. Wuister, Pei-yang Yan
Advanced Lithography (2015)
Cited2Views0Bibtex
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Author Statistics

#Papers: 31

#Citation: 339

H-Index: 11

G-Index: 17

Sociability: 5

Diversity: 1

Activity: 0

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