Application of the Rapid Thermal-Process - Sintering the Sputtered Aluminum Silicon Contact in Silicon Detector Fabrication
Conference Record of the 1991 IEEE Nuclear Science Symposium and Medical Imaging Conference（2002）
关键词
aluminium,capacitors,electrical contacts,leakage currents,metal-insulator-semiconductor devices,semiconductor counters,semiconductor-metal boundaries,silicon,sintering,Al-Si contact,MOS capacitors,Si detector,fabrication,flatband voltages,gamma radiation,leakage current,p/sup +/-n junction detector,rapid thermal process,sintering,sputtered Al gate
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