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Sliced multilayer gratings (SMG) based on Co/C multilayer coatings for the carbon window (4.4-5 nm)

E A Bugaev, R M Feschenko,Aleksandr V Vinogradov, D L Vorornov, V A Tokarev,V P Petukhov

Proceedings of SPIE(2005)

Cited 2|Views2
Key words
optical coatings,diffraction,plasmas,carbon
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