Advanced Ligo Two-Stage Twelve-Axis Vibration Isolation and Positioning Platform. Part 2: Experimental Investigation and Tests Results
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY(2015)
Key words
Vibration isolation,Seismic isolation,Active isolation,Passive isolation,Vibration isolator,Multi-axis platform,Positioning system,Vacuum compatible,Low-noise instrument
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