Design of a 3000-Pixel Transition-Edge Sensor X-Ray Spectrometer for Microcircuit Tomography
Paul Szypryt,Douglas A. Bennett, William J. Boone,Amber L. Dagel,Gabriella Dalton,W. Bertrand Doriese,M. Durkin,Joseph W. Fowler,Edward J. Garboczi,Johnathon D. Gard,Gene C. Hilton,Jozsef Imrek,Edward S. Jimenez,Vincent Y. Kotsubo,Kurt Larson,Zachary H. Levine,John A. B. Mates,Daniel McArthur,Kelsey M. Morgan,Nathan Nakamura,Galen C. O'Neil,Nathan J. Ortiz,Christine G. Pappas,Carl D. Reintsema,Daniel R. Schmidt,Daniel S. Swetz,Kyle R. Thompson,Joel N. Ullom,Christopher Walker,Joel C. Weber,Abigail L. Wessels,Jason W. Wheeler IEEE Transactions on Applied Superconductivity（2021）
Key words
Computed tomography,integrated circuit measurements,scanning electron microscopy,transition-edge sensors
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