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Hyperspectral X-Ray Imaging: Progress Towards Chemical Analysis in the SEM

Matthew H. Carpenter,Benjamin Stein,Katrina E. Koehler,Christopher J. Fontes,Chandler M. Smith,Gregory L. Wagner,Zachary K. Baker,Matthew L. Handley,Michael W. Rabin,Ping Yang,Enrique R. Batista,Daniel G. McNeel,Katherine A. Schreiber,Eric G. Bowes,Joel N. Ullom, Galen C. ONeil,Carl D. Reintsema,Douglas A. Bennett,Gene C. Hilton,Daniel S. Swetz,Daniel R. Schmidt,John A. B. Mates,Daniel T. Becker,Joel C. Weber,Johnathon D. Gard,Kelsey M. Morgan,Jozsef Imrek,Daikang Yan,Abigail L. Wessels,Mark Croce

IEEE transactions on applied superconductivity（2021）

Cited 2|Views26
Key words
Gold,Detectors,NIST,Chemicals,Scanning electron microscopy,Prototypes,Energy resolution,Transition Edge Sensor,TES,X-ray Spectroscopy,Non-Destructive Analysis,Nuclear Safeguards,Energy-Dispersive Spectroscopy,EDS,Electron Microscopy,Scanning Electron Microscope,SEM
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