Micro-Transfer Printing for Heterogeneous Si Photonic Integrated Circuits
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS(2023)
Key words
Silicon,Photonics,Printing,Optical waveguides,Integrated optics,Substrates,III-V semiconductor materials,Integrated optoelectronics,photodiodes,printing,semiconductor lasers,silicon on insulator technology,wafer-scale integration,waveguide components
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