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Spatial Frequency Breakdown of CD Variation

Tatiana Kovalevich, Barbara Witek,Daniel Riggs,Joost Bekaert,Lieve Van Look,Mark John Maslow

37TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE（2022）

Cited 0|Views6
Key words
CD variability,Fourier analysis,LCDU breakdown,Scanning electron metrology,Extreme ultraviolet lithography
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