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Towards In-Line Real-Time Characterization of Roll-to-roll Produced ZTO/Ag/ITO Thin Films by Hyperspectral Imaging

Susanne Dogan-Surmeier,Florian Gruber,Steffen Bieder,Patrick Schlenz,Michael Paulus,Christian Albers,Eric Schneider,Nicola Thiering, Christian Maurer,Metin Tolan,Philipp Wollmann, Steffen Cornelius,Christian Sternemann

JOURNAL OF PHYSICS D-APPLIED PHYSICS（2023）

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关键词
hyperspectral imaging,x-ray reflectivity,machine learning,thickness prediction,thin films
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