Micro‐ and Nano‐Raman Spectroscopy Characterization of Exfoliated Graphene with Helium‐Ion Microscope Patterned Line Defects

Material´s patterned modifications are crucial for device fabrication, and their evolution from the micro‐ to the nanoscale depends on the development of modification and characterization techniques. Herein, a graphene sample cut by a He‐ion beam is characterized using Raman spectroscopy. What can be obtained from micro‐Raman spectroscopy as compared to nano‐Raman spectroscopy is analyzed, the latter implemented in the tip‐enhanced Raman spectroscopy (TERS) configuration. Local sputtering, inhomogeneous distributions of defects, strain and doping are only observed in the higher‐resolution nano‐Raman‐mode characterization.