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Innovative Process to Obtain Thin Films and Micro-Nanostructured ZrN Films from a Photo-Structurable ZrO2 Sol-Gel Using Rapid Thermal Nitridation

V. Vallejo-Otero,N. Crespo-Monteiro,A. Valour,C. Donnet,S. Reynaud,N. Ollier,M. F. Blanc Mignon,J. P. Chatelon,Y. Bleu,E. Gamet,Y. Jourlin

Materials Today Advances（2023）

Cited 1|Views29
Key words
Zirconium nitride,Sol-gel method,Rapid thermal nitridation,Optical properties,Micro-nanostructuring
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