Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Efficient Mask Characterization Through Automated Contour and Corner Rounding Extraction

Rainer Zimmermann,Joost Bekaert,Mariya Braylovska, Balakumar Baskaran, Vicky Philipsen, Martin Bohn, Michael Bachmann,Ulrich Klostermann, Eric Hendrickx,Wolfgang Demmerle

38th European Mask and Lithography Conference (EMLC 2023)（2023）

Cited 0|Views0
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined