偏压对高功率脉冲磁控溅射法沉积MoN涂层结构及性能的影响KANG Jian,SUI Xudong,YANG Shuyan,ZHOU Haibin,HAO Junying,WAN Yong,LIU WeiminTribology（2023）引用 0|浏览13关键词HiPIMS,MoN coating,bias voltage,friction and wear,wear resistanceAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
