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Mechatronic Spatial Atomic Layer Deposition for Closed‐Loop and Customizable Process Control

Daniel Penley,Tae H. Cho, Andre J. Brooks, Lauren Ransohoff,Hyunwoo Park, Ellis Herman,Enpei Zhao,Orlando Trejo,Kira Barton,Neil P. Dasgupta

ADVANCED MATERIALS TECHNOLOGIES（2024）

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Key words
closed-loop,control,design,manufacturing,mechatronic,spatial atomic layer deposition
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