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Recent Progress in Heterogeneous Integration on the Silicon Nitride Platform Using Micro-Transfer Printing

Maximilien Billet,Tom Vanackere,Tom Vandekerckhove,Margot Niels,Luis Reis,Dennis Maes,Max Kiewiet,Konstantinos Akritidis,Stijn Cuyvers,Stijn Poelman,Tom Reep, Valeria Bonito Oliva,Francois Leo,Gunther Roelkens,Bart Kuyken

SILICON PHOTONICS XIX（2024）

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Key words
Heterogenous integration,Transfer printing,Silicon nitride,Silicon photonics,III-V,Lithium niobate
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