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Localized Nanopore Fabrication in Silicon Nitride Membranes by Femtosecond Laser Exposure and Subsequent Controlled Breakdown.

ACS APPLIED MATERIALS & INTERFACES(2025)

Cited 0|Views24
Key words
solid state nanopore,femtosecond-laser irradiation,laser processing,controlled breakdown,dielectricbreakdown,DNA translocation,nanopore
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