Mechanistic Studies of Positive-Tone Organoantimony Resists

Jordan Greenough, Nitinkumar S. Uphadyay,Shaheen Hasan,Munsaf Ali, Ricardo Burke,Greg Denbeaux,Robert L. Brainard

Journal of Photopolymer Science and Technology（2024）

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Key words

EUV,Outgassing,Photoresist,Antimony,Positive-Tone,Mechanism

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