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Highly-Selective Etching of Micro-Transfer-Printed Thin-Film Lithium Niobate for Low Coupling Losses

Tom Vandekerckhove, Ruben Van Assche,Ivo Tanghe,Margot Niels,Stijn Poelman,Tom Vanackere,Maximilien Billet,Stéphane Clemmen,Bart Kuyken

2024 Conference on Lasers and Electro-Optics (CLEO)（2024）

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Key words
Thin Films,Etching,Thin-film Lithium Niobate,Selective Etching,Waveguide,Wet Etching,Silicon Photonics
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