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Study on the Destruction and Removal Efficiency (DRE) of Perfluorinated Compound Gases Used in Semiconductor and Display Processes in Korea: DRE and Uncertainty by Scrubber Type

Seongmin Kang,Jiyun Woo,Goeun Kim, Daekee Min,Joohee Lee,Eui-chan Jeon

PROCESSES（2024）

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Key words
destruction and removal efficiency,PFC gases,semiconductor and display processes
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