Enhanced Mode Localization in 2-Dof Weakly Coupled Electrostatic MEMS Resonant Sensor Devices Via Blue-Sideband Excitation
IEEE TRANSACTIONS ON ELECTRON DEVICES（2025）
Key words
2-DOF,Couplings,Sensitivity,Electrostatics,Vibrations,Frequency measurement,Perturbation methods,Location awareness,Micromechanical devices,Voltage measurement,2-degree-of-freedom (2-DoF) weakly coupled electrostatic resonators,blue-sideband excitation (BSE),double-ended tuning fork (DETF) resonator,mode localization,multiple parameter monitoring
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