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Single-electron Charge Sensor Self-Aligned to a Quantum Dot Array by Double-Gate Patterning Process

Takuma Kuno,Takeru Utsugi,Ryuta Tsuchiya, Noriyuki Lee,Toshiyuki Mine,Itaru Yanagi,Raisei Mizokuchi,Jun Yoneda,Tetsuo Kodera,Shinichi Saito,Digh Hisamoto,Hiroyuki Mizuno

JAPANESE JOURNAL OF APPLIED PHYSICS（2025）

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Key words
quantum computer,single electron transistor,electron spin,quantum dot
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